Bentham is offering subject-based scholarly content collections which are tailored to meet specific research needs. Researchers can access related articles from current and back volumes by purchasing access to these collections. Subscribers will also have access to new articles as soon as they are published and added to these collections. With new articles being added to these collections on a daily basis, the collections serve as an ideal tool to keep researchers updated with new developments in the respective fields.
Author(s): Kunihiro Suzuki
Pp: 18-31 (14)
DOI: 10.2174/9781608057900113020004
* (Excluding Mailing and Handling)
Two-dimensional profile model for ion implantation at high tilt angle was derived, in order to describe the pocket ion implantation of MOSFETs. Then we can generate two-dimensional profile of ion implantation for the full MOS process neglecting diffusion of dopants, in order to predict electrical characteristic of MOSFETs.
Keywords: Ion implantation, two-dimensional profile, lateral distribution, MOSFET’s, co-implantation, flash lamp annealing, redistribution, diffusion, inverse modeling, extension, straggling, lateral straggling, reverse short channel effect, pocket ion implantation, VLSI.
Cite this chapter as:
Analytical Model for Two-Dimensional Profile in MOSFET’s, Ion Implantation and Activation (2013) 2: 18. https://doi.org/10.2174/9781608057900113020004
DOIhttps://doi.org/10.2174/9781608057900113020004 Print ISSN2589-2940
Publisher NameBentham Science Publisher
Online ISSN2215-0005
Current Graphene Science (Discontinued)
Recent Patents on Materials Science
Journal of Photocatalysis
Current Applied Materials (Discontinued)
Current Materials Science
Current Mechanics and Advanced Materials (Discontinued)
Current Catalysis
Polymer Engineering: Science & Technology
Current Nanomaterials
Journal of Bio-catalysis and Photocatalysis (Discontinued)
Advanced Materials and Nano Systems: Theory and Experiment - Part 2
Advanced Materials and Nano Systems: Theory and Experiment (Part-1)
The Art of Nanomaterials
Nano Materials Induced Removal of Textile Dyes from Waste Water
Nanobiotechnology: Principles and Applications
Bio-Inspired Nanotechnology
Synthesis of Nanomaterials
Materials Science: A Field of Diverse Industrial Applications
Synthesis and Applications of Semiconductor Nanostructures
Industrial Applications of Polymer Composites
