Ion Implantation and Activation

Volume: 1

The Other Analytical Model for Ion Implantation Profiles: Edgeworth Polynomial

Author(s): Kunihiro Suzuki

Pp: 223-240 (18)

DOI: 10.2174/9781608057818113010009

* (Excluding Mailing and Handling)


Pearson function is commonly used to express ion implantation profiles based on its four moments. Pearson function is not the unique one that uses the given four moments. Edgeworth polynomial is a function that is also generated using the four moments or more. We explain the model in this section, and express some experimental data with this model.

Keywords: Ion implantation, Edgeworth polynomial, Hermete polynomial, kurtosis, moment, characteristic function, exponential function, Hermete polynomial, Gaussian function, central limit theorem, cumulants, standard deviation, SIMS, Sb, Pearson function.

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